P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools All parts of the tube

All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials

SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

This Standard is expected to:

SEMI MF1152-0316 (technical revision)

The calibration method is defined in SEMI M53

P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools All parts of the tubeThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available