F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) StdPbc-0123 SEMI MF1811-97 (Reapproved 2002) (first

SEMI MF1811-97 (Reapproved 2002) (first SEMI publication)

This Test Method details the time dependent dielectric breakdown (TDDB) gate oxide integrity (GOI) approach to silicon wafer characterization

The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment

orgで入手可能になり，2004年7月発行に至る。初版は1996年12月に発行された。

5 µm to 12 µm

F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) StdPbc-0123 SEMI MF1811-97 (Reapproved 2002) (firstNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Test Method will determine the quantity of removable moisture and the degree of interaction with trace concentrations of gas phase moisture, of gas distribution systems and components. atmospheric pressure ionization