F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0623 SEMI E112-1017 (technical revision)

SEMI E112-1017 (technical revision)

in a standardized way

file naming conventions

completeness

SEMI P35 — Terminology for Microlithography Metrology

F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0623 SEMI E112-1017 (technical revision)NOTICE: This Document was completely rewritten in 2019. The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point of use (POU) gas filters. This Test Method defines an evaluation method for POU filters of various media (e. g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are