TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Lithius Working Spare img{max-width:100%} Nikon 4S019-137-B REX-DRV3 Board

img{max-width:100%} Nikon 4S019-137-B REX-DRV3 Board PCB NSR-S307E System Working Spare

This Ebara LE-559 Cold Trap Turbomolecular Pump Assembly HT-018-MCPQ Varian is used working surplus

**NOTES GO HERE**

5080-192421-11 CROSS ROLLER RING SCRA-X-50-0 2

ARM NP8148E043-0 4

TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Lithius Working Spare img{max-width:100%} Nikon 4S019-137-B REX-DRV3 BoardTEL Tokyo Electron 5087 400391 12 ARM R COT Scan Assembly Lithius Working Spare Inventory # A 18747 Part No: 5087 400391 12 Model No: SCAN ASSY ARM R COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Installed Components Sanyo Denki Stepping Motor Part No: 103H7851 70E1, StepSyn SMC Linear Actuator Part No: LG 96A A1 Parts List (approximation, parts may vary) Assembly Part No: 5087 400391 12 SCAN ASSY 5024 000118 11