M05400 - SEMI M54 - 半絶縁性（SI）GaAs材料のパラメータのガイド Revision:SEMI M54-0304 - Superseded SEMI MF1388-1106 (technical revision)

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This Specification covers dimensional

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M05400 - SEMI M54 - 半絶縁性（SI）GaAs材料のパラメータのガイド Revision:SEMI M54-0304 - Superseded SEMI MF1388-1106 (technical revision)global Compound Semiconductor Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2003320043 : nSI GaAs SI GaAs Referenced SEMI Standards SEMI M9 Specifications for Polished Monocrystalline Gallium Arsenide Slices SEMI M10 Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide SEMI M15 Polished Wafer Defect Limits Table for Polished Gallium Arsenide