D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks StdPbc-1217 The purpose of this Safety

The purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation

5  The Standard includes practical methodologies of flux

orgで。初版は1981年，前版は2001年11月に発行された。

and materials used in the design and fabrication of an integrated chip

This Practice may also be applied to detection of defects in epitaxial layers

D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks StdPbc-1217 The purpose of this SafetyThis Standard defines the terminology for FPD phase shift masks and mask blanks. This Standard applies to phase shift masks and mask blanks that are principally used in fabricating flat panel displays. Referenced SEMI Standards (purchase separately) None. Revision History SEMI D84 0823 (first published)