MRC Materials Research 63464553 SPUT 3 Shield Kit 200mm Eclipse Star Surplus 10000 SCCM

10000 SCCM

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MRC Materials Research 63464553 SPUT 3 Shield Kit 200mm Eclipse Star Surplus 10000 SCCMMRC Materials Research 63464553 SPUT 3 Shield Kit 200mm Eclipse Star Surplus Part No: 63464553 Kit Includes: 1ea API 1123 SS PS Shield 1ea D1160051 SS Filler Ring 2ea D119451 SS Corner Shield 1ea D116374 SS Gate Valve 1ea D119223 SS Dark Spacer Ring 1ea D123466 D119348 SS Shield Spacer Ring 1ea D124736 S SS Shield Plenum 1ea D119118 SS Cathode Adapter Shield 1ea D114820 D119017 SS Door SPA Shield This MRC 63464553 Eclipse Star (SPUT 3) Shield Kit