M07900 - SEMI M79 - 太陽電池用円盤状100 mm鏡面研磨単結晶ゲルマニウムウェーハの仕様 Revision:SEMI M79-0211 - Superseded Fabrication in the cleanroom

Fabrication in the cleanroom

Many different types of microscopes and micrometer attachments are used for dimensional measurements

research and development

and the Americas

This Document is also used by semiconductor processing equipment suppliers to specify standardized interfaces to pump suppliers

M07900 - SEMI M79 - 太陽電池用円盤状100 mm鏡面研磨単結晶ゲルマニウムウェーハの仕様 Revision:SEMI M79-0211 - Superseded Fabrication in the cleanroomglobal Compound Semiconductor Materials Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org 100 mm Referenced SEMI Standards SEMI M1 Specification for Polished Single Crystal Silicon Wafers SEMI MF26 Test Methods for Determining the Orientation of a Semiconductive Single Crystal SEMI MF43 Test Methods for Resistivity of Semiconductor Materials SEMI MF154 Guide for Identification of Structures and Contaminants