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C00339 - SEMI C3.39 - 三フッ化窒素(NF3)99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded 서비스는
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Description
서비스는
SEMI M16-1296 (technical revision)
SEMI PV79-0818 (technical revision)
SEMI MF847-02 (first SEMI publication)
This Test Method refers to the analysis of the bulk of the materials
C00339 - SEMI C3.39 - 三フッ化窒素(NF3)99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded 서비스는global Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org198920043 (NF3) Referenced SEMI Standards None.
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