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C00339 - SEMI C3.39 - 三フッ化窒素(NF3)99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded 서비스는

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서비스는

SEMI M16-1296 (technical revision)

SEMI PV79-0818 (technical revision)

SEMI MF847-02 (first SEMI publication)

This Test Method refers to the analysis of the bulk of the materials

C00339 - SEMI C3.39 - 三フッ化窒素(NF3)99.98%品質の仕様 Revision:SEMI C3.39-1011 - Superseded 서비스는global Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org198920043 (NF3) Referenced SEMI Standards None.

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