E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive previously published January 2017

previously published January 2017

and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path

97% Quality

It does not include information on the structure of the message

Immunity is specified in terms of voltage sag depth (in percent of nominal voltage remaining during the sag) and voltage sag duration (in cycles or seconds)

E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive previously published January 2017The purpose of this Document is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities. It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge, voltage, and electric field. This Guide is complementary to SEMI E78 and