E04300 - SEMI E43 - 物体および表面上の静電気測定のためのガイド StdTpc-Cluster Tools high accuracy and fidelity to

high accuracy and fidelity to these standard features are necessary

4 — 200 mm Standard Mechanical Interface (SMIF)

This Guide assumes that the virgin HPIX resin tested is representative of the virgin HPIX resin to be loaded in the mixed-beds tanks

SEMI E80-0299 (first published)

1-0312 (Reapproved 0324)

E04300 - SEMI E43 - 物体および表面上の静電気測定のためのガイド StdTpc-Cluster Tools high accuracy and fidelity toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Metrics Global Technical Committee201364global Audits and Reviews Subcommittee20138www. semiviews. org www. semi. org1995200811 (ESD) Referenced SEMI Standards SEMI E33 Guide for Semiconductor Manufacturing Equipment Electromagnetic