F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods 이전 버전은 2011년 11월에 출판되었다

이전 버전은 2011년 11월에 출판되었다

SEMI E22-91 (first published)

concerned with management of the availability of qualified factory personnel

This Document covers requirements for hydrogen chloride used in the semiconductor industry

and discuss the quality of data produced by the production equipment

F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods 이전 버전은 2011년 11월에 출판되었다NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Facilities CommitteeNorth American Facilities Committee2002829 North American Regional Standards Committee20029www. semi. org2002111995 1 Referenced SEMI Standards None.