F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 StdTpc-Jig ID development

development

1  This Guide provides examples of the capabilities and limitations of various measurement technologies applicable to BWS as well as their suitability for different applications

This Guide establishes a procedure to facilitate an understanding of equipment-related costs

Dimensional metrics as described in several SEMI Test Methods do not define wafer physical orientation during measurement

本基準亦提供半導體設備的能源、電力與原料的使用率及耗量降低情形通報之方法。

F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 StdTpc-Jig ID developmentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Gases Committee2008513global Audits and Reviews Subcommittee20086www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive