E13400 - SEMI E134 - Specification for Data Collection Management Revision:SEMI E134-1225 - Current maintenance technicians and engineers

maintenance technicians and engineers

SEMI E84-0701 (technical revision)

This parallel I/O interface only controls the automated handoff operation of the carrier

It does not include information on the structure of the message

1-0707 (technical revision)

E13400 - SEMI E134 - Specification for Data Collection Management Revision:SEMI E134-1225 - Current maintenance technicians and engineers* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1