Nikon 4S013-374-2 Linear Motor Controller SPA452B WYR NSR-S307E DUV Working The unit ramped up to

The unit ramped up to full speed and pumped down to 3 mTorr

Delta Design 2001-586-000 Bus Interface PCB Summit ATC Handler used working

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Nikon 4S013-374-2 Linear Motor Controller SPA452B WYR NSR-S307E DUV Working The unit ramped up toNikon 4S013 374 2 Linear Motor Controller SPA452B WYR NSR S307E DUV Working Part No: 4S013 374 2 Model No: SPA452B WYR Electrical Diagram No: 4S587 470 3 Removed from a Nikon NSR S307E 300mm DUV Scanning System Made in Japan This Nikon 4S013 374 2 is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working Surplus, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W