E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded 1 This Standard contains terminology

1  This Standard contains terminology and reference documents used in SEMI E49

The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into

and behavior identified in this Document

SEMI E73 — Specification for Vacuum Pump Interfaces – Dry Pumps

as this information requires user input and is already specified by SEMI E58

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded 1 This Standard contains terminologyThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any