F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 and oxidizing gas

and oxidizing gas

SEMI E43-0813 (Reapproved 1019)

permanent bonding could be adhesive

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

but are not limited to:

F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal StdPbc-0725 and oxidizing gasThis Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment. Since EFFU is an assembly of particle filter, fan, and motor, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance. This Test Method defines an evaluation