E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Revision:SEMI E54.11-0316 - Superseded An EPT state model that

An EPT state model that defines triggers for state changes

SEMI G38-0996 (Reapproved 0811)

such as an optical filar

The scope is limited to defining the key EQIPs and their linking to process program parameters

1  This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure processed wafers to be used in a 3DS-IC process

E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Revision:SEMI E54.11-0316 - Superseded An EPT state model thatNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment