E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 Revision:SEMI E120-0414 - Superseded and/or to meet ergonomic requirements

and/or to meet ergonomic requirements for manually loaded equipment

investment evaluation

This Specification applies to photomasks that are principally used in fabricating flat panel displays

orgで，そして2007年7月にCD-ROMで入手可能となる。初版は2000年6月発行，前版は2001年11月に発行された。

SEMI E17-91 (first published)

E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 Revision:SEMI E120-0414 - Superseded and/or to meet ergonomic requirementsThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment