F04200 - SEMI F42 - Test Method for Semiconductor Processing Equipment Voltage Sag Immunity Revision:SEMI F42-0200 - Replaced 本文書は，FPDカラーフィルタの色表現の特性評価に用いられる手法を定義するものである。

本文書は，FPDカラーフィルタの色表現の特性評価に用いられる手法を定義するものである。

• To identify and define key properties of EUV substrates and blanks which should be specified in the purchase order between users and suppliers

This Test Method describes a procedure

documentation

4 and SEMI M6

F04200 - SEMI F42 - Test Method for Semiconductor Processing Equipment Voltage Sag Immunity Revision:SEMI F42-0200 - Replaced 本文書は，FPDカラーフィルタの色表現の特性評価に用いられる手法を定義するものである。NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F47. The purpose of this Document is to define the test method used to characterize the susceptibility of semiconductor processing, metrology, and automated test equipment to voltage sags. This Document defines the testing procedures and test equipment required to characterize the susceptibility of equipment to voltage sags by showing voltage