F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 Revision:SEMI F19-0304 (Reapproved 0310) - Superseded This Test Method follows the

This Test Method follows the roadmap laid out by SEMI M54 (GaAs) and SEMI M55 (SiC)

SEMI E134-0319 (technical revision)

which are technology specific

use of this marking symbol will facilitate the future elimination of the numerous types of OC cut shapes presently in use

for the purposes of this Guide this should also be considered to include alternating

F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 Revision:SEMI F19-0304 (Reapproved 0310) - Superseded This Test Method follows theglobal Gases Committee20091216global Audits and Reviews Subcommittee20102www. semi. org1995220043 SEMI F20 Referenced SEMI Standards SEMI F20 Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate, and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications SEMI F37 Method for Determination of Surface Roughness Parameters for Gas Distribution System Components SEMI F60 Test Method for ESCA Evaluation