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M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded within semiconductor device manufacturing facilities
M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded within semiconductor device manufacturing facilities
$115.50
Description
within semiconductor device manufacturing facilities
Activation can take up to 3 business days
color appearance model) in this Standard
equipment for different substrate sizes will become simpler
1 This Specification provides a means to acquire event
M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded within semiconductor device manufacturing facilitiesglobal Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards None.
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