G06300 - SEMI G63 - ダイ剪断強度の測定方法 StdVol-3D-IC SEMI D53-0421 (technical revision)
$115.50
Description
SEMI D53-0421 (technical revision)
This standard is intended to set levels of specification for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity
This Specification defines dimensional requirements and options of reticle load ports on reticle stockers
such as caustics and oxidizers
This Document specifies a SAN communications standard based on the CC-Link specification that is in compliance with SEMI E54
G06300 - SEMI G63 - ダイ剪断強度の測定方法 StdVol-3D-IC SEMI D53-0421 (technical revision)global Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org199520023 : Referenced SEMI Standards None.
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