E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0417 6-0710 (technical revision)

6-0710 (technical revision)

mass flow controllers (MFCs)

1  In Test Method 1

This Standard was technically approved by the Flat Panel Display - Factory Automation Global Technical Committee

and behavior are implemented for this device

E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0417 6-0710 (technical revision)This Standard specifies XML structures required to encode message header or envelope information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas. XML is also used to structure information needed to route and deliver messages between applications. A standard for message headers is required to avoid development and