E08300 - SEMI E83 - PGVメカニカルドッキングフランジの仕様 Revision:SEMI E83-0413 - Superseded SEMI E16-90 (Reapproved 0699)

SEMI E16-90 (Reapproved 0699)

この文書の範囲は，

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment

SEMI M20 — Practice for Establishing a Wafer Coordinate System

and the mixture 70wt% PGME/30wt% PGMEA which are used as solvents in the semiconductor industry for advanced resist technology

E08300 - SEMI E83 - PGVメカニカルドッキングフランジの仕様 Revision:SEMI E83-0413 - Superseded SEMI E16-90 (Reapproved 0699)SEMI SEMI Physical Interfaces & Carriers Global Technical Committee2014512global Audits and Reviews Subcommittee20147www. semiviews. org www. semi. org1999620134 PGV PGVSEMI E15. 1SEMI G82 300mmSEMI 154 450mmSEMI E64 Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E64 Specification for 300 mm Cart to SEMI E15. 1 Docking Interface Port SEMI E154 Mechanical Interface