E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids originally published in 1984

originally published in 1984

SEMI MF1530-1105 (technical revision)

transfer of reticles to and from the reticle pods

本安全ガイドラインは，供給から除害まで，可燃性シリコン化合物の貯蔵，取り扱い，および使用に関する最低限の安全および健康の基準となることを目的とする。

1  The scope of this Standard is all grades of ammonium fluoride 40% used in the semiconductor industry

E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids originally published in 1984NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Subordinate Standards (included): SEMI E90. 1 0312 Specification for SECS II Protocol Substrate Tracking Referenced SEMI Standards (purchase separately) SEMI E30 Specification for the Generic Model for Communications and Control of