Aera PI-98 Series Mass Flow Controller MFC Reseller Lot of 8 Working Surplus Model No: X Y Theta

Model No: X Y Theta Encoder Cable Set

Inventory # 17306

PANASONIC MSM021A1E Servo Motor Used

This Heraeus SVG 42313 is used working surplus

The unit is marked as bad (see photos)

Aera PI-98 Series Mass Flow Controller MFC Reseller Lot of 8 Working Surplus Model No: X Y ThetaAera PI 98 Series Mass Flow Controller MFC Reseller Lot of 8 Working Surplus Part No: PI 98 Series Reseller Lot of 8 May Require Calibration Made in China Included Components Novellus Part No: 22 192819 00; 5000 SCCM, He Novellus Part No: 22 408429 00; 3000 SCCM, N2 Novellus Part No: 22 408428 00; 500 SCCM, SiH4 Novellus Part No: 22 408432 00; 3000 SCCM, H2 Novellus Part No: 22 408434 00; 5000 SCCM, N2 Novellus Part No: 22 408437 00; 1000 SCCM, NF3