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E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology This Test Method is especially

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This Test Method is especially applicable for silicon where boron is an unintentional p-type contaminant at trace levels (<5 × 1014 atoms/cm3)

The surface characterization tests to be performed are specified herein

to be published February 1999

本标准规定了铝浆的共同特性,包括但不限于外观、颗粒度、固含量和粘度,烧结后的铝浆要求,包括但不限于附着力试验、弯曲度试验和水煮试验。

By this Standard

E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology This Test Method is especiallyglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.

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