E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C maintenance technicians and engineers

maintenance technicians and engineers

SEMI E41 — Exception Management (EM) Standard

本仕様では，ハードコート極紫外線（EUV）マスクにマークする記号法について記載する。

Radial resistivity variations are a function of the crystal growth process and dopant

• Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)

E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C maintenance technicians and engineersNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing