F05700 - SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems Revision:SEMI F57-0622 - Current the Current version is the

the Current version is the official and authoritative version

SEMI M17-1110 (Reapproved 1015)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

SEMI M38-0306 (technical revision)

and survey available metrology tools

F05700 - SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems Revision:SEMI F57-0622 - Current the Current version is theThis Standard specifies minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultrapure water (UPW) in UPW distribution systems. Further information regarding UPW systems can be found in SEMI F61, SEMI F63. It also provides recommendations for the use of polymer materials and components used in UHP liquid chemical distribution systems (LCDS). Such distribution systems covered in this