P01200 - SEMI P12 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresists by Inductively Coupled Plasma Emission Spectroscopy (ICP) Revision:SEMI P12-0997 - Inactive 4-0698 (first published)

4-0698 (first published)

2  This Guide analyzes several key parameters which influence the diffusion process results in low pressure

SEMI MF1529 — Test Method for Sheet Resistance Uniformity Evaluation by In-line Four-Point Probe with the Dual-Configuration Procedure

or the emitter saturation current density of the dopant diffusion

The scope is limited to defining the key EQIPs and their linking to process program parameters

P01200 - SEMI P12 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresists by Inductively Coupled Plasma Emission Spectroscopy (ICP) Revision:SEMI P12-0997 - Inactive 4-0698 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This procedure is an ICP plasma emission analysis for determination of iron, zinc, calcium, magnesium, copper, boron, aluminum, chromium, manganese, and nickel in photoresist. The applicable concentration range is 0. 1 to 1