Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems Ingestion-build-239834 With best-practice guidance on testing

With best-practice guidance on testing of monolithic ceramics and materials in ISO 21618

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Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems Ingestion-build-239834 With best-practice guidance on testingWhat is BS EN 62047 11 Linear thermal expansion of free standing materials used in micro electromechanical systems about? BS EN 62047 11 is the 11th part of an international standard used for Semiconductor devices. BS EN 62047 11 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free standing solid (metallic, ceramic, polymeric, etc.) microelectromechanical system (MEMS) materials with the length between 0,1