Surface chemical analysis. Scanning-probe microscopy. Measurement of drift rate Ingestion-build-53008 BS IEC 61892-3 specifies requirements

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Surface chemical analysis. Scanning-probe microscopy. Measurement of drift rate Ingestion-build-53008 BS IEC 61892-3 specifies requirements1 Scope This International Standard defines terms and specifies measurement methods for characterizing the drift rates of scanning probe microscopy (SPM) instruments in the X and Y directions and, for SPM instruments measuring topography, the drift rate in the Z direction. Though the behaviour of the long term drift rate might be nonlinear, both that and the behaviour of the short term drift rate after a user defined settling time can be characterized