LaAlO3, (110) orn. EPI polishing 3" x 0.5mm wafer 1 SP --- MTI Special !!!-1 Te DO NOT set the pressure
$540.50
Description
DO NOT set the pressure gauge above 90 psi (0
Notes The recommended distance from source to sensor is 12 inch
001 Ca (wt%) <0
Dimensions 653mm x 462mm x 443mm Shipping Weight 410 lbs
Polish: One side EPI polished by CMP tecnology with less sub-surface lattice damage
LaAlO3, (110) orn. EPI polishing 3" x 0.5mm wafer 1 SP --- MTI Special !!!-1 Te DO NOT set the pressureSubstrate Specifcations: Wafer Size: 3" dia + 0. 5 mm x 0. 5 thickness + 0. 05 mm Wafer Orientation: (110) + 0. 5 Deg Edge Orientation: <001> + 1 Deg with 20 mm Length Polishing: CMP polished with free sub surface damaged Surface finish (RMS or Ra) : < 15A Package: Under 1000 class clean room, and in 100 grade plastic bag in a wafer container. Lattice Constant a=3. 792Pseudo cubic Warning: LaAlO3 crystal has a visible twin on a polished surface, which
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