1750 Grade MoSi2 Heating Element (30x270mm) Processing Tubes Orientation: (100)
$4542.50
Description
Orientation: (100)
wafer InGaAs EPI on InP (Semi-insulating)(100) by MOCVD deposition
Chamber Structure
Application case ---------------------- EQ-PCE-3
4" diameter
1750 Grade MoSi2 Heating Element (30x270mm) Processing Tubes Orientation: (100)Specifications D1: 12mm D2: 6mm A: 30mm L=L1+L2:=160+110=270mm Materials: MoSi2 Max. surface temperature: 1750 C Working temperature: 1700C (in air, < 1 hour) Max. 1600C ( in air) continuous 1600C (in N2) 1220C ~ 1500C (in H2) Volume Density: 5 ~ 5. 6g cm3 Bend strength: 15 ~ 25kg cm3 Vickers hardness: (HV) 570kg mm2) Porosity rate: 7. 4% Water absorption: 2% Heat extensibility: 4% Resistivity Properties of MoSi2 Heating Element The resistivity of
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